HSB Baffles

Protection of turbopumps against premature damage

Frequently, in high-vacuum applications for the production of complex layer systems, critical gases or gas mixtures are used. Depending on the process, it may be necessary to evacuate these gases with the high-vacuum pump. In many cases, it is unavoidable that such gases or vapors condense as solid particles in the pump, significantly impairing the pump’s function or, as in the case of turbomolecular pumps, even leading to their destruction.

The HSR protective baffle condenses these harmful gases before they enter the turbomolecular pump, thus protecting it against functional impairment or even destruction.

Function

• Protects the turbopump against vapor deposition
• Extends the service life of the turbopump if dealing with metallic deposits

Characteristics

• Optically dense
• Maximized conductance
• Extremely maintenance friendly
• Removable inner part enables easy cleaning
• Cooling agents: water, liquid nitrogen, Polycold, refrigeration unit
• Housing made of stainless steel
• Baffle optionally made of stainless steel or copper
• Available in sizes DN 100 – DN 320

Further applications

• Use as additional water vapor pump by cooling with liquid nitrogen, Polycold, or a refrigeration unit